Inlet liner for substrate processing apparatus



FIG. 1 is a front, top and right side perspective view of an inlet linerfor substrate processing apparatus showing our new design;

FIG. 2 is a front elevational view thereof;

FIG. 3 is a rear elevational view thereof;

FIG. 4 is a right side elevational view thereof;

FIG. 5 is a left side elevational view thereof;

FIG. 6 is a top plan view thereof;

FIG. 7 is a bottom plan view thereof; and,

FIG. 8 is a cross-sectional view take along line 8-8 in FIG. 6.

The broken line arrow shows the association of the two sides of thecross sectional view in FIG. 8 and forms no part of the claimed design.

CLAIM The ornamental design for an inlet liner for substrate processingapparatus, as shown and described.